MULTILAB 2000 BASE SYSTEM OVERVIEW

Technical Characteristics

• Multi-technique surface analysis system.
• High flux MgKα/AlKα dual anode X-ray source for high performance XPS.
• High sensitivity and high resolution spectroscopy.
• Small area lens for dual anode XPS (down to 100µm).
• Selectable angular resolution (down to 1.0^O).
• High transmission electron energy analyser for XPS, AES, UPS and ISS.
• Selectable energy resolution (choice of 4 slit selections).
• Multi-channeltron array parallel detector for high dynamic performance.
• Differentially pumped fine focus ion gun for good depth profiling and ISS.
• Mu-metal analysis chamber for quality low energy analysis.
• Ion pumped analysis chamber for good UHV (around 10^-10 mbar).
• High flux lamp for high performance UPS. Both HeI and HeII modes of operation. Small spot size (≈1.5 mm).
• CCD TV camera and microscope for simple sample alignment (area 400μm to 4 mm).
• Simple design allows choice of sample entry chambers.
• Digital control of analyser, X-ray source and depth profiling functions.