MULTILAB 2000 BASE SYSTEM OVERVIEW
Technical Characteristics
- Multi-technique surface analysis system.
- High flux MgKα/AlKα dual anode X-ray source for high performance XPS.
- High sensitivity and high resolution spectroscopy.
- Small area lens for dual anode XPS (down to 100µm).
- Selectable angular resolution (down to 1.0O).
- High transmission electron energy analyser for XPS, AES, UPS and ISS.
- Selectable energy resolution (choice of 4 slit selections).
- Multi-channeltron array parallel detector for high dynamic performance.
- Differentially pumped fine focus ion gun for good depth profiling and ISS.
- Mu-metal analysis chamber for quality low energy analysis.
- Ion pumped analysis chamber for good UHV (around 10-10 mbar).
- High flux lamp for high performance UPS. Both HeI and HeII modes of operation. Small spot size (≈1.5 mm).
- CCD TV camera and microscope for simple sample alignment (area 400μm to 4 mm).
- Simple design allows choice of sample entry chambers.
- Digital control of analyser, X-ray source and depth profiling functions.