SOPRA-Semilab GES 5-E elipsometer

GES 5-E Sopra Semilab is a variable angle spectroscopic ellipsometer, which also allows spectroscopic scatterometry, photometry, reflectometry, polarimetry and porosimetry of thin films and substrates. It has a high resolution CCD sensor (210 - 1000 nm) for the visible spectral region and a near infrared (910 - 2400 nm) detector, with a combined spectrum sensitivity range from 210 to 2400 nm.