FIB

 

Nanolitography or litography assisted by ions.

Software Nanobuilders 

 lamellae.jpg

TEM sample preparation.

Software AUTOTEM.

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3D volume reconstruction or 3D tomography.

Software Auto Slice and View and Amira.

 cros_section.jpgcross_section.jpg

Cross section analysis.

Software AUTOTEM.

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Micromanipulation

 nanoinden.jpg The FMS-EM is a compact force readout tool for the MM3A-EM micromanipulator Kleindiek. It enhances your system by allowing you to perform force measurements and nanoindentation.
 electrical_measure.jpg Electrical measurements  made by  MM3A-EM micromanipulators Kleindiek, placed on a microscope FESEM Nanolab Helios 650. These micromanipulators have a sub-nanometers resolution (0.25 nm) in their movement being precise, compact and flexible in its location within the vacuum chamber of the electron microscope.
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Imaging

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STEM imaging: Dark field, bright field and HADDF. Retractable detector STEM II 

 CBS.jpg Retractable detector CBS: backscattering electron image gives chemical and topographical information. 
 SE_imaging.jpg

The outstanding imaging capabilities of the Helios NanoLab 650 begin with its Elstar™ FESEM. Thanks to its integrated monochromator (UC) and beam deceleration mode, it delivers sub-nanometer resolution across the whole 1-30 kV range (0.8 nm at 15 kV and 0.9 nm at 1kV). ETD and TLD detectors on mode Secondary Electron or Backscatering Electron images. 

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Chemical characterization

 eds_layer_map2.jpgedx_map.jpg EDS image mapping from Oxford SDD detector
 edx_analisis.jpg EDS quantification and linescan analysis

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Additional information