FIB
Nanolitography or litography assisted by ions. Software Nanobuilders |
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TEM sample preparation. Software AUTOTEM. |
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3D volume reconstruction or 3D tomography. Software Auto Slice and View and Amira. |
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Cross section analysis. Software AUTOTEM. |
Micromanipulation
The FMS-EM is a compact force readout tool for the MM3A-EM micromanipulator Kleindiek. It enhances your system by allowing you to perform force measurements and nanoindentation. | |
Electrical measurements made by MM3A-EM micromanipulators Kleindiek, placed on a microscope FESEM Nanolab Helios 650. These micromanipulators have a sub-nanometers resolution (0.25 nm) in their movement being precise, compact and flexible in its location within the vacuum chamber of the electron microscope. |
Imaging
STEM imaging: Dark field, bright field and HADDF. Retractable detector STEM II |
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Retractable detector CBS: backscattering electron image gives chemical and topographical information. | |
The outstanding imaging capabilities of the Helios NanoLab 650 begin with its Elstar™ FESEM. Thanks to its integrated monochromator (UC) and beam deceleration mode, it delivers sub-nanometer resolution across the whole 1-30 kV range (0.8 nm at 15 kV and 0.9 nm at 1kV). ETD and TLD detectors on mode Secondary Electron or Backscatering Electron images. |
Chemical characterization
EDS image mapping from Oxford SDD detector | |
EDS quantification and linescan analysis |