HELIOS NANOLAB 650

This model is the top model of the Dual Microscope from FEI. The SEM column (Elstar XHR immersion lens FESEM column) has resolution of 0.8nm at 15kV and and 0.9 nm at 1 kV and it bears an integrated monochromator (UC) and beam deceleration. It delivers sub-nanometer resolution across the whole 1-30 kV range. The FIB column (Tomahawk ion column) is differentially vacuum-pumped at the lowest part, allowing a well-defined beam profile to hit the sample surface.

It is designed to access a new world of extreme high resolution (XHR) 2D and 3D characterization, nanoprototyping, and higher quality sample preparation. Preliminary results with such a column indicate that ultranarrow nanodeposits can be grown. This FIB column is nicely suited for lamellae preparation, in combination with the Omniprobe nanomanipulator. The equipment has got 5 gas injectors for nanodeposition and the local etching of certain materials too. Besides, the equipment has electrical microprobes and nanoidentation, EDX and EBSD+CBD detections and STEM detection